Paper
31 December 2009 Diagnostics tools for subsurface damage characterization of ground silica parts
P. Cormont, J. Neauport, N. Darbois, J. Destribats, C. Ambard, O. Rondeau
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Abstract
Subsurface cracks in fused silica optics are known to be damage initiators under laser irradiation. Each step of optic production, from sawing to polishing, creates its own type of cracks. An efficient optic manufacturing process requires that each production step removes cracks from the previous step. The extent of cracks has to be measured for each production step. We review and compare different subsurface damage (SSD) characterization techniques applied to ground and fine ground fused silica samples.
© (2009) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
P. Cormont, J. Neauport, N. Darbois, J. Destribats, C. Ambard, and O. Rondeau "Diagnostics tools for subsurface damage characterization of ground silica parts", Proc. SPIE 7504, Laser-Induced Damage in Optical Materials: 2009, 75040Y (31 December 2009); https://doi.org/10.1117/12.836368
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Cited by 1 scholarly publication.
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KEYWORDS
Magnetorheological finishing

Silica

Optics manufacturing

Polishing

Surface roughness

Etching

Diamond

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