Development of large size MgF2 single crystal grown by the CZ method

Masao Ariyuki; Yasuhiro Hashimoto; Naoto Mochizuki; Yoji Inui; Isao Masada; Teruhiko Nawata; Tsuguo Fukuda

doi:10.1117/12.836349

31 December 2009 Development of large size MgF₂ single crystal grown by the CZ method

Masao Ariyuki, Yasuhiro Hashimoto, Naoto Mochizuki, Yoji Inui, Isao Masada, Teruhiko Nawata, Tsuguo Fukuda

Proceedings Volume 7504, Laser-Induced Damage in Optical Materials: 2009; 75041Q (2009) https://doi.org/10.1117/12.836349
Event: Laser Damage Symposium XLI: Annual Symposium on Optical Materials for High Power Lasers, 2009, Boulder, Colorado, United States

Abstract

In the semiconductor lithography technology, the polarized illumination system is applied to make the resolution more microscopic, therefore the polarizer material with excellent durability against the high power ArF laser has been required. Magnesium fluoride (MgF₂) is one of a suitable material because of its laser durability and high transparency in VUV region. Previously we reported MgF₂ single crystal with diameter of 100mm by using the Czochralski (CZ) method. By optimizing the crystal growth conditions, MgF₂ single crystals with over 150mm in diameter have been stably grown. Also these crystals show good optical properties and crystallinity.

Citation Download Citation

Masao Ariyuki, Yasuhiro Hashimoto, Naoto Mochizuki, Yoji Inui, Isao Masada, Teruhiko Nawata, and Tsuguo Fukuda "Development of large size MgF₂ single crystal grown by the CZ method", Proc. SPIE 7504, Laser-Induced Damage in Optical Materials: 2009, 75041Q (31 December 2009); https://doi.org/10.1117/12.836349

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