Output power enhancement of light-emitting diodes with defect passivation layer

Ming-Hua Lo; Po-Min Tu; Yuh-Jen Cheng; Chao-Hsun Wang; Cheng-Wei Hung; Shih-Chieh Hsu; Hao-Chung Kuo; Hsiao-Wen Zan; Shing-Chung Wang; Chun-Yen Chang; Che-Ming Liu

doi:10.1117/12.841513

16 March 2010 Output power enhancement of light-emitting diodes with defect passivation layer

Ming-Hua Lo, Po-Min Tu, Yuh-Jen Cheng, Chao-Hsun Wang, Cheng-Wei Hung, Shih-Chieh Hsu, Hao-Chung Kuo, Hsiao-Wen Zan, Shing-Chung Wang, Chun-Yen Chang, Che-Ming Liu

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Proceedings Volume 7602, Gallium Nitride Materials and Devices V; 76021X (2010) https://doi.org/10.1117/12.841513
Event: SPIE OPTO, 2010, San Francisco, California, United States

Abstract

We demonstrate high efficiency blue light emitting diodes with defect passivation layers. The defect passivation layers were formed by defect selective wet etching, SiO₂ deposition, and chemical mechanical polishing process. The process does not require photolithography patterning. The threading dislocation density of grown sample was reduced down to ~4×10⁷ cm^-2. The defect passivated epi-wafer is used to grow light emitting diode (LED) and the output power of the fabricated chip is enhanced by 45% at 20 mA compared to a reference one without using defect passivation.

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Ming-Hua Lo, Po-Min Tu, Yuh-Jen Cheng, Chao-Hsun Wang, Cheng-Wei Hung, Shih-Chieh Hsu, Hao-Chung Kuo, Hsiao-Wen Zan, Shing-Chung Wang, Chun-Yen Chang, and Che-Ming Liu "Output power enhancement of light-emitting diodes with defect passivation layer", Proc. SPIE 7602, Gallium Nitride Materials and Devices V, 76021X (16 March 2010); https://doi.org/10.1117/12.841513

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