Nanofabrication with a helium ion microscope

Diederik Maas; Emile van Veldhoven; Ping Chen; Vadim Sidorkin; Huub Salemink; Emile . van der Drift; Paul Alkemade

doi:10.1117/12.862438

1 April 2010 Nanofabrication with a helium ion microscope

Diederik Maas, Emile van Veldhoven, Ping Chen, Vadim Sidorkin, Huub Salemink, Emile . van der Drift, Paul Alkemade

Proceedings Volume 7638, Metrology, Inspection, and Process Control for Microlithography XXIV; 763814 (2010) https://doi.org/10.1117/12.862438
Event: SPIE Advanced Lithography, 2010, San Jose, California, United States

Abstract

The recently introduced helium ion microscope (HIM) is capable of imaging and fabrication of nanostructures thanks to its sub-nanometer sized ion probe. The unique interaction of the helium ions with the sample material provides very localized secondary electron emission, thus providing a valuable signal for high-resolution imaging as well as a mechanism for very precise nanofabrication. The low proximity effects, due to the low yield of backscattered ions and the confinement of the forward scattered ions into a narrow cone, enable patterning of ultra-dense sub-10 nm structures. This paper presents various nanofabrication results obtained with direct-write, with scanning helium ion beam lithography, and with helium ion beam induced deposition.

Citation Download Citation

Diederik Maas, Emile van Veldhoven, Ping Chen, Vadim Sidorkin, Huub Salemink, Emile . van der Drift, and Paul Alkemade "Nanofabrication with a helium ion microscope", Proc. SPIE 7638, Metrology, Inspection, and Process Control for Microlithography XXIV, 763814 (1 April 2010); https://doi.org/10.1117/12.862438

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available