Simplified "Litho-Cluster-Only" solution for double patterning

H. Tanaka; K. Hoshiko; T. Shimokawa; H. F. Hoefnagels; D. E. Keller; S. Wang; O. Tanriseven; R. Maas; J. Mallman; K. Shigemori; C. Rosslee

doi:10.1117/12.848462

30 March 2010 Simplified "Litho-Cluster-Only" solution for double patterning

H. Tanaka, K. Hoshiko, T. Shimokawa, H. F. Hoefnagels, D. E. Keller, S. Wang, O. Tanriseven, R. Maas, J. Mallman, K. Shigemori, C. Rosslee

Author Affiliations +

Proceedings Volume 7639, Advances in Resist Materials and Processing Technology XXVII; 76391V (2010) https://doi.org/10.1117/12.848462
Event: SPIE Advanced Lithography, 2010, San Jose, California, United States

Abstract

Double patterning is one of the enabling techniques to allow for further shrinking of devices in the future. Many different solutions, like LELE (Litho-Etch-Litho-Etch) and LPL (Litho-Process-Litho), have been investigated in the past years. In this paper a simplified - "Litho-Cluster-Only" - solution for double patterning is presented. This topcoat-less thermal freeze process has high capability of reaching 26 nm 1:1 LS. In addition it is shown that defect counts for the thermal freeze process approach defect numbers for high end immersion processes.

Citation Download Citation

H. Tanaka, K. Hoshiko, T. Shimokawa, H. F. Hoefnagels, D. E. Keller, S. Wang, O. Tanriseven, R. Maas, J. Mallman, K. Shigemori, and C. Rosslee "Simplified "Litho-Cluster-Only" solution for double patterning", Proc. SPIE 7639, Advances in Resist Materials and Processing Technology XXVII, 76391V (30 March 2010); https://doi.org/10.1117/12.848462

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available