Fabrication of microstructure array by means of ultra-precision micro-milling

Peng Zhang; Bo Wang; Yingchun Liang

doi:10.1117/12.866245

6 October 2010 Fabrication of microstructure array by means of ultra-precision micro-milling

Peng Zhang, Bo Wang, Yingchun Liang

Proceedings Volume 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 76550U (2010) https://doi.org/10.1117/12.866245
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

In recent years, as the development of optics and micro-electronics science and technology, new advances and requirements have brought challenges and opportunities to ultra-precision machining technology, which has become the core technology of the manufacture and represent the highest level of fabrication domain. To meet the new requirement of ultra-precision and ultra-smooth and miniaturization in the advanced optical manufacture field, ultra-precision machining technology using micro machine tool is becoming a good choice to fabricate ultra-precision microstructure surface because of the advantage of low cost, high efficiency and flexibility. In this paper, a micro three-axis ultraprecision milling machine tool is developed, aerostatic guideway drove directly by linear motor is adopted in order to reduce the transfer motion to guarantee the enough stiffness of the machine, and novel numerical control strategy with linear encoders of nanometer-level resolution used as the feedback of the control system is employed to ensure the extremely high motion control accuracy. Excellent nanometer-level micro-movement performance of the axis is proved by motion control experiment. Steps, pyramids and convex lens array microstructures with different scales on material of polyvinyl chloride (PVC) are fabricated based on the ultra-precision micro-milling technology using three different kinds of milling tool, and the cutting performance are observed by the scanning electron microscope(SEM), which prove that ultra-precision micro-milling technology based on micro ultra-precision machine tool is a suitable, economical and optional method for micro manufacture of microstructure array surface on different kinds of materials.

Citation Download Citation

Peng Zhang, Bo Wang, and Yingchun Liang "Fabrication of microstructure array by means of ultra-precision micro-milling", Proc. SPIE 7655, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 76550U (6 October 2010); https://doi.org/10.1117/12.866245

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