Linear polarization modulation heterodyne ellipsometer using digital signal processing technique

Chih-Jen Yu; Chien Chou

doi:10.1117/12.875103

23 February 2011 Linear polarization modulation heterodyne ellipsometer using digital signal processing technique

Chih-Jen Yu, Chien Chou

Proceedings Volume 7934, Optical Components and Materials VIII; 79341G (2011) https://doi.org/10.1117/12.875103
Event: SPIE OPTO, 2011, San Francisco, California, United States

Abstract

In this research, a novel linear polarization modulation heterodyne ellipsometer (LPMHE) integrated with a digital signal processor is able to measure ellipsometric parameters of a specimen was developed. In this setup, a pair of orthogonally circularly polarized lights with slightly different frequency of the laser beam is used which behaves like a linear polarization rotator at high speed. By integrating with a digital storage oscilloscope, LPMHE is able to real-time measure ellipsometric parameters precisely. When the incident angles of laser beam are set at 60° and 70° in LPMHE, an accuracy of less than 0.7% on ellipsometric parameters measurement of the SiO₂ thin film deposited on silicon substrate was demonstrated.

Citation Download Citation

Chih-Jen Yu and Chien Chou "Linear polarization modulation heterodyne ellipsometer using digital signal processing technique", Proc. SPIE 7934, Optical Components and Materials VIII, 79341G (23 February 2011); https://doi.org/10.1117/12.875103

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