Low-power thermal tuning of SOI-CMOS photonic structures

Ivan Shubin; Xuezhe Zheng; Guoliang Li; Hiren Thacker; Jin Yao; Bruce Guenin; Thierry Pinguet; Attila Mekis; A. V. Krishnamoorthy; J. E. Cunningham

doi:10.1117/12.876428

17 January 2011 Low-power thermal tuning of SOI-CMOS photonic structures

Ivan Shubin, Xuezhe Zheng, Guoliang Li, Hiren Thacker, Jin Yao, Bruce Guenin, Thierry Pinguet, Attila Mekis, A. V. Krishnamoorthy, J. E. Cunningham

Author Affiliations +

Proceedings Volume 7944, Optoelectronic Interconnects and Component Integration XI; 794402 (2011) https://doi.org/10.1117/12.876428
Event: SPIE OPTO, 2011, San Francisco, California, United States

Abstract

Ring waveguide resonating structures with high quality factors are the key components servicing silicon photonic links. We demonstrate highly efficient spectral tunability of the microphotonic ring structures manufactured in commercial 130 nm SOI CMOS technology. Our rings are fitted with dedicated heaters and integrated with silicon micro-machined features. Optimized layout and structure of the devices result in their maximized thermal impedance and increased efficiency of the thermal tuning.

Citation Download Citation

Ivan Shubin, Xuezhe Zheng, Guoliang Li, Hiren Thacker, Jin Yao, Bruce Guenin, Thierry Pinguet, Attila Mekis, A. V. Krishnamoorthy, and J. E. Cunningham "Low-power thermal tuning of SOI-CMOS photonic structures", Proc. SPIE 7944, Optoelectronic Interconnects and Component Integration XI, 794402 (17 January 2011); https://doi.org/10.1117/12.876428

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