Three-dimensional refractive index and thickness distribution of thin film measurements through dynamic multiwavelength interferometry

Kai Wu; Cheng-Chung Lee

doi:10.1117/12.890255

26 May 2011 Three-dimensional refractive index and thickness distribution of thin film measurements through dynamic multiwavelength interferometry

Kai Wu, Cheng-Chung Lee

Author Affiliations +

Proceedings Volume 8082, Optical Measurement Systems for Industrial Inspection VII; 80820P (2011) https://doi.org/10.1117/12.890255
Event: SPIE Optical Metrology, 2011, Munich, Germany

Abstract

A vibration-insensitive interferometer with simple structure is proposed. Under normal incidence, both the reflection phase and magnitude of the thin film at different wavelengths were measured and utilized to calculate refractive index and thickness of the thin film. The experiment results showed the precisions were obviously increased after the phase measurements were added into analysis.

Citation Download Citation

Kai Wu and Cheng-Chung Lee "Three-dimensional refractive index and thickness distribution of thin film measurements through dynamic multiwavelength interferometry", Proc. SPIE 8082, Optical Measurement Systems for Industrial Inspection VII, 80820P (26 May 2011); https://doi.org/10.1117/12.890255

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