Development of a one-dimensional Wolter mirror for achromatic full-field x-ray microscopy

S. Matsuyama; N. Kidani; H. Mimura; J. Kim; Y. Sano; K. Tamasaku; Y. Kohmura; M. Yabashi; T. Ishikawa; K. Yamauchi

doi:10.1117/12.892987

28 September 2011 Development of a one-dimensional Wolter mirror for achromatic full-field x-ray microscopy

S. Matsuyama, N. Kidani, H. Mimura, J. Kim, Y. Sano, K. Tamasaku, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi

Proceedings Volume 8139, Advances in X-Ray/EUV Optics and Components VI; 813905 (2011) https://doi.org/10.1117/12.892987
Event: SPIE Optical Engineering + Applications, 2011, San Diego, California, United States

Abstract

We investigated a one-dimensional Wolter mirror (which consists of an elliptical mirror and a hyperbolic mirror) with the aim of developing an achromatic full-field X-ray microscope with a resolution of better than 50 nm. X-ray mirrors were ultraprecisely fabricated by elastic emission machining to give a figure accuracy of 2 nm (peak-to-valley). A one-dimensional Wolter mirror that had been precisely constructed was evaluated in terms of the point-spread function at the center of the field of view (FOV) and the FOV at an X-ray energy of 11.5 keV at BL29XUL of SPring-8. It was found to have a minimum resolution of 43 nm and a FOV equivalent to 12.1 μm. These results are highly consistent with calculation results.

Citation Download Citation

S. Matsuyama, N. Kidani, H. Mimura, J. Kim, Y. Sano, K. Tamasaku, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi "Development of a one-dimensional Wolter mirror for achromatic full-field x-ray microscopy", Proc. SPIE 8139, Advances in X-Ray/EUV Optics and Components VI, 813905 (28 September 2011); https://doi.org/10.1117/12.892987

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