Radiation effects on multiple DOF MEMS inertial sensors

Bill Dillard; Victor Trent; Michael Greene; Edward W. Taylor

doi:10.1117/12.892799

31 August 2011 Radiation effects on multiple DOF MEMS inertial sensors

Bill Dillard, Victor Trent, Michael Greene, Edward W. Taylor

Proceedings Volume 8164, Nanophotonics and Macrophotonics for Space Environments V; 81640R (2011) https://doi.org/10.1117/12.892799
Event: SPIE Optical Engineering + Applications, 2011, San Diego, California, United States

Abstract

Much work has been conducted and published in the area of radiation hardening of electronics. These efforts have yielded an array of techniques and design protocols for mitigating radiation effects in hardware. However, in the field of MEMS sensor systems, radiation can impact not only the support structure but the MEMS structure itself. In this work, a new multiple degree-of-freedom MEMS inertial sensor called MARS (MEMS Annular Rotating Sensor) has been subjected to Co⁶⁰ gamma-ray irradiation and results analyzed for total dose effects. Pre- and post-radiation tests reveal that the sensor's accelerometer noise performance is enhanced by the exposure. Quantitatively, noise levels improved after radiation by roughly 40% in the X and Y axes and 75% in the Z axes. Additionally, any effects of radiation on sensor offset were not discernable.

Citation Download Citation

Bill Dillard, Victor Trent, Michael Greene, and Edward W. Taylor "Radiation effects on multiple DOF MEMS inertial sensors", Proc. SPIE 8164, Nanophotonics and Macrophotonics for Space Environments V, 81640R (31 August 2011); https://doi.org/10.1117/12.892799

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