Optical characterization of subwavelength-scale solid immersion lenses

Myun-Sik Kim; Toralf Scharf; Mohammad Tahdiul Haq; Wataru Nakagawa; Hans Peter Herzig

doi:10.1117/12.905472

9 February 2012 Optical characterization of subwavelength-scale solid immersion lenses

Myun-Sik Kim, Toralf Scharf, Mohammad Tahdiul Haq, Wataru Nakagawa, Hans Peter Herzig

Proceedings Volume 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V; 82491B (2012) https://doi.org/10.1117/12.905472
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States

Abstract

We present the fabrication and optical characterization of nano-scale solid immersion lenses (nano-SILs) with sizes down to a subwavelength range. Submicron-scale cylinders fabricated by electron-beam lithography (EBL) are thermally reflowed to form a spherical shape. Subsequent soft lithography leads to nano-SILs on transparent substrates, i.e. glass, for optical characterization with visible light. The optical characterization is performed using a high-resolution interference microscope (HRIM) with illumination at 642 nm wavelength. The measurements of the 3D amplitude and phase fields provide information on the spot size and the peak intensity. In particular, the phase measurement is a more convincing proof of the Airy disc size reduction rather than the full-width at half maximum (FWHM) spot size. The focal spots produced by the nano-SILs show both spot-size reduction and enhanced optical intensity, which are consistent with the immersion effect. In this way, we experimentally confirm the immersion effect of a subwavelength-size SIL (d = 530 nm and h = 45 nm) with a spot reduction ratio of 1.35, which is less than the expected value of 1.5, most likely due to the slightly non-ideal shape of the nano-SIL.

Citation Download Citation

Myun-Sik Kim, Toralf Scharf, Mohammad Tahdiul Haq, Wataru Nakagawa, and Hans Peter Herzig "Optical characterization of subwavelength-scale solid immersion lenses", Proc. SPIE 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V, 82491B (9 February 2012); https://doi.org/10.1117/12.905472

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KEYWORDS

Spherical lenses

Solids

Polymethylmethacrylate

Glasses

Polymers

Lithography

3D metrology

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