Miniaturization as a key factor to the development and application of advanced metrology systems

Cosme Furlong; Ivo Dobrev; Ellery Harrington; Peter Hefti; Morteza Khaleghi

doi:10.1117/12.981668

11 September 2012 Miniaturization as a key factor to the development and application of advanced metrology systems

Cosme Furlong, Ivo Dobrev, Ellery Harrington, Peter Hefti, Morteza Khaleghi

Proceedings Volume 8413, Speckle 2012: V International Conference on Speckle Metrology; 84130T (2012) https://doi.org/10.1117/12.981668
Event: SPECKLE 2012: V International Conference on Speckle Metrology, 2012, Vigo, Spain

Abstract

Recent technological advances of miniaturization engineering are enabling the realization of components and systems with unprecedented capabilities. Such capabilities, which are significantly beneficial to scientific and engineering applications, are impacting the development and the application of optical metrology systems for investigations under complex boundary, loading, and operating conditions. In this paper, and overview of metrology systems that we are developing is presented. Systems are being developed and applied to high-speed and high-resolution measurements of shape and deformations under actual operating conditions for such applications as sustainability, health, medical diagnosis, security, and urban infrastructure. Systems take advantage of recent developments in light sources and modulators, detectors, microelectromechanical (MEMS) sensors and actuators, kinematic positioners, rapid prototyping fabrication technologies, as well as software engineering.

Citation Download Citation

Cosme Furlong, Ivo Dobrev, Ellery Harrington, Peter Hefti, and Morteza Khaleghi "Miniaturization as a key factor to the development and application of advanced metrology systems", Proc. SPIE 8413, Speckle 2012: V International Conference on Speckle Metrology, 84130T (11 September 2012); https://doi.org/10.1117/12.981668

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