Removal of misfit dislocations from mismatched layers in heterostructures

Mileta M. Arakelyan

doi:10.1117/12.923228

25 January 2012 Removal of misfit dislocations from mismatched layers in heterostructures

Mileta M. Arakelyan

Proceedings Volume 8414, Photonics and Micro- and Nano-structured Materials 2011; 84140K (2012) https://doi.org/10.1117/12.923228
Event: Photonics and Micro- and Nano- structured Materials 2011, 2011, Yerevan, Armenia

Abstract

The method of the misfit dislocation removal from working area of the devices on heterostructures is theoretically offered. The chainlet of the edge dislocation (one-dimensional soliton-soliton bound state) is formed in substrate and film border by special preliminary processing. The stress field of such chainlet pushes away a misfit dislocation incipient on the borders of the heterostructures. By numerical experiment it is shown that the stress field of a chainlet is compressed in a sliding direction and it increases in a perpendicular direction, when the velocity is increased. It is possible to influence locally on the given dislocation varying the parameters of the system.

Citation Download Citation

Mileta M. Arakelyan "Removal of misfit dislocations from mismatched layers in heterostructures", Proc. SPIE 8414, Photonics and Micro- and Nano-structured Materials 2011, 84140K (25 January 2012); https://doi.org/10.1117/12.923228

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