Design and fabrication of microwindmill for fluidic media based on SU-8 for using flow-meter

I. Sabri Alirezaei; M. Ghaderi; M. Khalafi; H. Latifi

doi:10.1117/12.922044

8 May 2012 Design and fabrication of microwindmill for fluidic media based on SU-8 for using flow-meter

I. Sabri Alirezaei, M. Ghaderi, M. Khalafi, H. Latifi

Proceedings Volume 8428, Micro-Optics 2012; 84281H (2012) https://doi.org/10.1117/12.922044
Event: SPIE Photonics Europe, 2012, Brussels, Belgium

Abstract

In this paper, we have introduced a method for design and fabrication of a micro-windmill based on SU-8 photoresist that is rotated by gas flow. This device is used for measuring gas flow by assessment of rotational speed of the microwindmill. The flow-meter sensitivity is influenced by different parameters such as number of blades and dimension of the windmills. Therefore, we have tried to experimentally reduce the dimensions and increase of the number of blades to obtain the higher sensitivity in measuring gas flow. An experimental setup is arranged to measure the rotational frequency of the windmill as a function of gas flow with optical methods.

Citation Download Citation

I. Sabri Alirezaei, M. Ghaderi, M. Khalafi, and H. Latifi "Design and fabrication of microwindmill for fluidic media based on SU-8 for using flow-meter", Proc. SPIE 8428, Micro-Optics 2012, 84281H (8 May 2012); https://doi.org/10.1117/12.922044

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