27 September 2012Fabrication and ab initio study of downscaled graphene nanoelectronic devices
Hiroshi Mizuta, Zakaria Moktadir, Stuart A. Boden, Nima Kalhor, Shuojin Hang, Marek E. Schmidt, Nguyen Tien Cuong, Dam Hieu Chi, Nobuo Otsuka, Manoharan Muruganathan, Yoshishige Tsuchiya, Harold Chong, Harvey N. Rutt, Darren M. Bagnall
Hiroshi Mizuta,1,2 Zakaria Moktadir,1 Stuart A. Boden,1 Nima Kalhor,1 Shuojin Hang,1 Marek E. Schmidt,1 Nguyen Tien Cuong,2 Dam Hieu Chi,2 Nobuo Otsuka,2 Manoharan Muruganathan,2 Yoshishige Tsuchiya,1 Harold Chong,1 Harvey N. Rutt,1 Darren M. Bagnall1
1Univ. of Southampton (United Kingdom) 2Japan Advanced Institute of Science and Technology (Japan)
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In this paper we first present a new fabrication process of downscaled graphene nanodevices based on direct milling of
graphene using an atomic-size helium ion beam. We address the issue of contamination caused by the electron-beam
lithography process to pattern the contact metals prior to the ultrafine milling process in the helium ion microscope
(HIM). We then present our recent experimental study of the effects of the helium ion exposure on the carrier transport
properties. By varying the time of helium ion bombardment onto a bilayer graphene nanoribbon transistor, the change in
the transfer characteristics is investigated along with underlying carrier scattering mechanisms. Finally we study the
effects of various single defects introduced into extremely-scaled armchair graphene nanoribbons on the carrier transport
properties using ab initio simulation.
Hiroshi Mizuta,Zakaria Moktadir,Stuart A. Boden,Nima Kalhor,Shuojin Hang,Marek E. Schmidt,Nguyen Tien Cuong,Dam Hieu Chi,Nobuo Otsuka,Manoharan Muruganathan,Yoshishige Tsuchiya,Harold Chong,Harvey N. Rutt, andDarren M. Bagnall
"Fabrication and ab initio study of downscaled graphene nanoelectronic devices", Proc. SPIE 8462, Carbon Nanotubes, Graphene, and Associated Devices V, 846206 (27 September 2012); https://doi.org/10.1117/12.956439
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Hiroshi Mizuta, Zakaria Moktadir, Stuart A. Boden, Nima Kalhor, Shuojin Hang, Marek E. Schmidt, Nguyen Tien Cuong, Dam Hieu Chi, Nobuo Otsuka, Manoharan Muruganathan, Yoshishige Tsuchiya, Harold Chong, Harvey N. Rutt, Darren M. Bagnall, "Fabrication and [i]ab initio[/i] study of downscaled graphene nanoelectronic devices," Proc. SPIE 8462, Carbon Nanotubes, Graphene, and Associated Devices V, 846206 (27 September 2012); https://doi.org/10.1117/12.956439