Paper
20 November 2012 Multi-frequency sweeping interferometry using spatial optical frequency modulation
Samuel Choi, Heiichi Kato, Osami Sasaki, Takamasa Suzuki
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Abstract
We investigated the interference amplitude and phase characteristics of a multi-frequency sweeping interferometer with sinusoidal phase modulating technique. A novel multi frequency sweeping light source that generated an interval and center frequency variable frequency comb with a bandwidth of 14 nm was demonstrated. The interference phase and amplitude distributions were investigated by observing the zeroth and first order interference signals. In addition, the zeroth and first order interference phase variations caused by center frequency sweeping were measured.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Samuel Choi, Heiichi Kato, Osami Sasaki, and Takamasa Suzuki "Multi-frequency sweeping interferometry using spatial optical frequency modulation", Proc. SPIE 8563, Optical Metrology and Inspection for Industrial Applications II, 856302 (20 November 2012); https://doi.org/10.1117/12.999555
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Cited by 1 scholarly publication.
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KEYWORDS
Interferometry

Light sources

Distance measurement

Interferometers

Mirrors

Phase shift keying

Scanning probe microscopy

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