Holographic fabrication of woodpile-type photonic crystal templates using silicon based single reflective optical element

Jeffrey Lutkenhaus; David George; Kris Ohlinger; Hualiang Zhang; Zsolt Poole; Kevin P. Chen; Yuankun Lin

doi:10.1117/12.2002882

5 March 2013 Holographic fabrication of woodpile-type photonic crystal templates using silicon based single reflective optical element

Jeffrey Lutkenhaus, David George, Kris Ohlinger, Hualiang Zhang, Zsolt Poole, Kevin P. Chen, Yuankun Lin

Author Affiliations +

Proceedings Volume 8613, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI; 86131C (2013) https://doi.org/10.1117/12.2002882
Event: SPIE MOEMS-MEMS, 2013, San Francisco, California, United States

Abstract

In this work, we present the holographic fabrication of woodpile-type photonic crystal templates in photosensitive polymer using a silicon-on-PDMS based reflective optical element. The reflective optical element is fabricated from four silicon chips placed inside a polydimethylsiloxane (PDMS) mold, which reflects a circularly or elliptically polarized beam into four linearly polarized side beams, arranged four-fold symmetrically about a central beam, with electric fields normal to the incident plane, and also reduces the laser intensity of the side beams. With a single beam and a single reflective optical element, we can generate the desired laser beam intensities and polarization of each beam, thereby creating woodpile-type photonic crystal templates, and improving the contrast of 3D structures.

Citation Download Citation

Jeffrey Lutkenhaus, David George, Kris Ohlinger, Hualiang Zhang, Zsolt Poole, Kevin P. Chen, and Yuankun Lin "Holographic fabrication of woodpile-type photonic crystal templates using silicon based single reflective optical element", Proc. SPIE 8613, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI, 86131C (5 March 2013); https://doi.org/10.1117/12.2002882

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