Copper germanium alloys formation by the low temperature atomic hydrogen treatment

Artyom I. Kazimirov; Evgeny V. Erofeev; Valery A. Kagadei

doi:10.1117/12.2016882

3 January 2013 Copper germanium alloys formation by the low temperature atomic hydrogen treatment

Artyom I. Kazimirov, Evgeny V. Erofeev, Valery A. Kagadei

Proceedings Volume 8700, International Conference Micro- and Nano-Electronics 2012; 870005 (2013) https://doi.org/10.1117/12.2016882
Event: International Conference on Micro-and Nano-Electronics 2012, 2012, Zvenlgorod, Russian Federation

Abstract

The influence of atomic hydrogen treatment on two-layer thin-film Cu/Ge system deposited on i-GaAs substrate was investigated. It was established that the treatment in an atomic hydrogen flow with density 10¹⁵ at./(cm²•s) at a room temperature for 5 min results the solid state interdiffusion of Cu and Ge thin films and polycrystalline CuGe alloy formation with the vertically oriented grains.

Citation Download Citation

Artyom I. Kazimirov, Evgeny V. Erofeev, and Valery A. Kagadei "Copper germanium alloys formation by the low temperature atomic hydrogen treatment", Proc. SPIE 8700, International Conference Micro- and Nano-Electronics 2012, 870005 (3 January 2013); https://doi.org/10.1117/12.2016882

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