Hydrocarbon gas detection with microelectromechanical Fabry-Perot interferometer

Rami Mannila; Mikko Tuohiniemi; Jussi Mäkynen; Ismo Näkki; Jarkko Antila

doi:10.1117/12.2016362

29 May 2013 Hydrocarbon gas detection with microelectromechanical Fabry-Perot interferometer

Rami Mannila, Mikko Tuohiniemi, Jussi Mäkynen, Ismo Näkki, Jarkko Antila

Proceedings Volume 8726, Next-Generation Spectroscopic Technologies VI; 872608 (2013) https://doi.org/10.1117/12.2016362
Event: SPIE Defense, Security, and Sensing, 2013, Baltimore, Maryland, United States

Abstract

VTT Technical Research Centre of Finland has developed microelectromechanical (MEMS) Fabry-Perot interferometer (FPI) for hydrocarbon measurements. Fabry-Perot interferometer is a structure where is two highly reflective surfaces separated by a tunable air gap. The MEMS FPI is a monolithic device, i.e. it is made entirely on one substrate in a batch process, without assembling separate pieces together. The gap is adjusted by moving the upper mirror with electrostatic force, so there are no actual moving parts. The manufactured MEMS FPIs have been characterized. The tuning wavelength range of the MEMS FPI is 2.8-3.5 μm and its spectral resolution is 50-60 nm. VTT has designed and manufactured a handheld size demonstrator device based on the technology presented in this abstract. This device demonstrates gas detecting by measuring cigarette lighter gas and various plastic materials transmission spectra. The demonstrator contains light source, gas cell, MEMS FPI, detector and control electronics. It is connected to a laptop by USB connection, additional power supply or connection is not needed.

Citation Download Citation

Rami Mannila, Mikko Tuohiniemi, Jussi Mäkynen, Ismo Näkki, and Jarkko Antila "Hydrocarbon gas detection with microelectromechanical Fabry-Perot interferometer", Proc. SPIE 8726, Next-Generation Spectroscopic Technologies VI, 872608 (29 May 2013); https://doi.org/10.1117/12.2016362

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