A long trace profiler with large dynamical range

A. Ritucci; M. Rossi

doi:10.1117/12.2020915

13 May 2013 A long trace profiler with large dynamical range

A. Ritucci, M. Rossi

Proceedings Volume 8788, Optical Measurement Systems for Industrial Inspection VIII; 87880E (2013) https://doi.org/10.1117/12.2020915
Event: SPIE Optical Metrology 2013, 2013, Munich, Germany

Abstract

A vertical Long Trace Profiler (LTP) has been developed to characterize profile slope and figure error of grazing incidence aspherical X-ray mirrors with short radius of curvature (1 m - 5 m) and length up to 300 mm while achieving more than 100 mrad-level dynamical range and acceptable value of measurement accuracy (< 10 μrad). The increase of the dynamical range is obtained by separating the optical path delivering the probe beam to the test surface from the light path reflected by the sample, and by using a movable collecting mirror to redirect it towards the detector. Experimental data acquired through the developed prototype on X-ray optics are compared with the profiles measured on the same samples through a more complex profiler (called MPR700) based on a high resolution distance measuring sensor, laser interferometers and precise optical flats. The comparison between the two devices demonstrates the functionality of the proposed LTP scheme and shows the possibility to extend the field of applications of the LTPs avoiding the need of more expensive measuring devices based on distance measuring sensors and optical references.

Citation Download Citation

A. Ritucci and M. Rossi "A long trace profiler with large dynamical range", Proc. SPIE 8788, Optical Measurement Systems for Industrial Inspection VIII, 87880E (13 May 2013); https://doi.org/10.1117/12.2020915

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