Development of the size calibration SOP for SEM measurement

Hyuksang Kwon; Si Yeon Noh; Nam Woong Song

doi:10.1117/12.2022991

20 September 2013 Development of the size calibration SOP for SEM measurement

Hyuksang Kwon, Si Yeon Noh, Nam Woong Song

Proceedings Volume 8819, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VII; 88190J (2013) https://doi.org/10.1117/12.2022991
Event: SPIE NanoScience + Engineering, 2013, San Diego, California, United States

Abstract

The size and size distribution of nanomaterials are important factors for understanding their characteristics. A scanning electron microscopy (SEM) provides an easily accessible method to characterize nanostructures. We have developed a standard operating protocol (SOP) for the calibration of SEM by using CRMs (certified reference materials) of 1 dimensional (1D) gratings with 80 and 180 nm spacing, respectively, which have been certified by using a metrological AFM. To get consistent analysis results using a fast Fourier transform (FFT) method, the numbers of lateral and longitudinal pixels in the SEM images were determined for line profiling. We could also observed that the pitch values of 1D grating CRM could be obtained as the reference ones within the uncertainty under the following imaging conditions; the exposure time of the sample to the electron beam for an image scanning should be shorter than 120 s and the working distance from 5 to 8.9 mm can be used.

Citation Download Citation

Hyuksang Kwon, Si Yeon Noh, and Nam Woong Song "Development of the size calibration SOP for SEM measurement", Proc. SPIE 8819, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VII, 88190J (20 September 2013); https://doi.org/10.1117/12.2022991

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