Design and implementation of film coating for tunable liquid crystal Fabry-Perot filter working in mid-infrared spectral region

Huaidong Zhang; Anbang Fu; Xinyu Zhang; Hongshi Sang; Changsheng Xie

doi:10.1117/12.2032155

26 October 2013 Design and implementation of film coating for tunable liquid crystal Fabry-Perot filter working in mid-infrared spectral region

Huaidong Zhang, Anbang Fu, Xinyu Zhang, Hongshi Sang, Changsheng Xie

Author Affiliations +

Proceedings Volume 8917, MIPPR 2013: Multispectral Image Acquisition, Processing, and Analysis; 891708 (2013) https://doi.org/10.1117/12.2032155
Event: Eighth International Symposium on Multispectral Image Processing and Pattern Recognition, 2013, Wuhan, China

Abstract

In this paper, we design and implementation anti-reflection and high reflection film for tunable LC-FP filter working in typical medium wave infrared (MWIR) spectral region. As to reflection mirror, we complete it by depositing gold film on the silicon substrate. By using the analytical method of dividing amplitude multiple beam interference to simulate the reflectance, the reflectivity result of the gold film is around 98% at the average in the MWIR spectral region. When take the absorption of the gold film into consideration, the gold film should be thin under the condition that it is conductive well. The anti-reflection film is introduced to reduce the reflection of the other side of the wafer. In anti-reflection structure, we simulate the reflection of the films with the algorithm of the equivalent membrane and fulfill our design with the technology of vapor deposition. Finally, we test the total transmittance of the wafer deposited gold films and anti-reflection films, which is about 0.2% of single chip. By making use of the wafer designed by us, we fabricate the LC-FP filter by placing two wafers side by side with the anti-reflection structure face to the direction of wavelength incident. Simultaneously, the LC layer with fixed thickness is sealed between the two high reflection mirrors formed by gold film. Compared with other method to fabricate mid-infrared FP filter, deposition of reflection and anti-reflection films on wafer have the advantage of low cost, simple technology.

Citation Download Citation

Huaidong Zhang, Anbang Fu, Xinyu Zhang, Hongshi Sang, and Changsheng Xie "Design and implementation of film coating for tunable liquid crystal Fabry-Perot filter working in mid-infrared spectral region", Proc. SPIE 8917, MIPPR 2013: Multispectral Image Acquisition, Processing, and Analysis, 891708 (26 October 2013); https://doi.org/10.1117/12.2032155

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KEYWORDS

Reflection

Semiconducting wafers

Gold

Transmittance

Mid-IR

Liquid crystals

Mirrors

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