A versatile instrumentation system for MEMS-based device optical characterization

Ramin Rafiei; Robert W. Basedow; K. K. M. B. Dilusha Silva; Jega T. Gurusamy; Jorge R. Silva Castillo; Dhirendra K. Tripathi; John M. Dell; Lorenzo Faraone

doi:10.1117/12.2034955

7 December 2013 A versatile instrumentation system for MEMS-based device optical characterization

Ramin Rafiei, Robert W. Basedow, K. K. M. B. Dilusha Silva, Jega T. Gurusamy, Jorge R. Silva Castillo, Dhirendra K. Tripathi, John M. Dell, Lorenzo Faraone

Author Affiliations +

Proceedings Volume 8923, Micro/Nano Materials, Devices, and Systems; 89232V (2013) https://doi.org/10.1117/12.2034955
Event: SPIE Micro+Nano Materials, Devices, and Applications, 2013, Melbourne, Victoria, Australia

Abstract

Future improvements in spectral imaging systems can be attained through the integration of MEMS-based optical transmission devices matched with pixelated arrays. Such integrated module designs will require a detailed knowledge of the MEMS device optical properties at high spatial resolution and over a wide range of operating conditions. A substantially automated low-cost optical characterization system has been developed, which enables the optical transmission of the MEMS device be measured with high spatial and spectral precision. This Optical Metrology System (OMS) can focus light on the device under test (DUT) to a spot diameter of less than 30 μm, and characterize devices at near infrared for wavelengths within the spectral band from 1.4 μm to 2.6 μm. A future upgrade to the OMS will enable measurements to be carried out across a wide range of DUT temperatures and with a spectral range from visible to long wave infrared wavelengths.

Citation Download Citation

Ramin Rafiei, Robert W. Basedow, K. K. M. B. Dilusha Silva, Jega T. Gurusamy, Jorge R. Silva Castillo, Dhirendra K. Tripathi, John M. Dell, and Lorenzo Faraone "A versatile instrumentation system for MEMS-based device optical characterization", Proc. SPIE 8923, Micro/Nano Materials, Devices, and Systems, 89232V (7 December 2013); https://doi.org/10.1117/12.2034955

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