Paper
7 December 2013 Formation of cylindrical micro-lens array in fused silica glass using laser irradiations
Hun-Kook Choi, Md. Shamim Ahsan, Dongyoon Yoo, Ik-Bu Sohn, Young-Chul Noh, Jin Tae Kim, Deok Jung, Jin Hyeok Kim
Author Affiliations +
Proceedings Volume 8923, Micro/Nano Materials, Devices, and Systems; 89234T (2013) https://doi.org/10.1117/12.2033772
Event: SPIE Micro+Nano Materials, Devices, and Applications, 2013, Melbourne, Victoria, Australia
Abstract
In this article, we report the development of plano-convex cylindrical micro-lens array on the surface of fused silica glass using laser processing technology. Initially, femtosecond laser pulses are irradiated on the target fused silica glass substrate to pattern periodic micro-grooves. Afterwards, laser beam from CO2 laser source is applied several times on the previously micro-patterned fused silica glass surface, the purpose of which is to polish the micro-patterned glass surface. As a consequence, periodic plano-convex cylindrical micro-lens array is evolved on the glass surface. The micro-lens array shows great consistency in size and shape throughout the sample area. We also investigate various optical properties of the micro-lenses evolved glass substrates including the diffraction pattern and diffraction efficiency of light. The glass sample comprising cylindrical micro-lens array can diffract light with moderate diffraction efficiency. We strongly believe that, it is possible to engineer cylindrical micro-lens array on the surface of a variety of transparent materials including glasses and polymers over a large area.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hun-Kook Choi, Md. Shamim Ahsan, Dongyoon Yoo, Ik-Bu Sohn, Young-Chul Noh, Jin Tae Kim, Deok Jung, and Jin Hyeok Kim "Formation of cylindrical micro-lens array in fused silica glass using laser irradiations", Proc. SPIE 8923, Micro/Nano Materials, Devices, and Systems, 89234T (7 December 2013); https://doi.org/10.1117/12.2033772
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CITATIONS
Cited by 8 scholarly publications.
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KEYWORDS
Glasses

Diffraction

Carbon dioxide lasers

Silica

Polishing

Femtosecond phenomena

Surface finishing

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