Effect of the subsidiary electrode in a newly developed source lens structure of the microcolumn

Tae-Sik Oh; Dae-Wook Kim; Ho Seob Kim; Won Kweon Jang

doi:10.1117/12.2033780

7 December 2013 Effect of the subsidiary electrode in a newly developed source lens structure of the microcolumn

Tae-Sik Oh, Dae-Wook Kim, Ho Seob Kim, Won Kweon Jang

Proceedings Volume 8923, Micro/Nano Materials, Devices, and Systems; 89234V (2013) https://doi.org/10.1117/12.2033780
Event: SPIE Micro+Nano Materials, Devices, and Applications, 2013, Melbourne, Victoria, Australia

Abstract

A subsidiary electrode was introduced between the extractor and anode in our newly developed source lens design of a micro electron column to improve the probe beam characteristics. At the same field enhancement factor of 3.95, the probe beam current showed a drastic increase compared to that of the conventional source lens structure. The design parameters of the newly developed source lens structure and the equipotential line distribution are presented with simulation results.

Citation Download Citation

Tae-Sik Oh, Dae-Wook Kim, Ho Seob Kim, and Won Kweon Jang "Effect of the subsidiary electrode in a newly developed source lens structure of the microcolumn", Proc. SPIE 8923, Micro/Nano Materials, Devices, and Systems, 89234V (7 December 2013); https://doi.org/10.1117/12.2033780

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