Growth and characterization of Sb2Te3 thin film deposited by pulsed laser method

Tantan Liu; Hongmei Deng; Pingxiong Yang; Jun Zhang; Huiyi Cao; Jun He; Junhao Chu

doi:10.1117/12.2053508

16 December 2013 Growth and characterization of Sb₂Te₃ thin film deposited by pulsed laser method

Tantan Liu, Hongmei Deng, Pingxiong Yang, Jun Zhang, Huiyi Cao, Jun He, Junhao Chu

Proceedings Volume 9068, Eighth International Conference on Thin Film Physics and Applications; 90681E (2013) https://doi.org/10.1117/12.2053508
Event: Eighth International Conference on Thin Film Physics and Applications (TFPA13), 2013, Shanghai, China

Abstract

Sb₂Te₃ film was deposited on glass substrates which were heated at180°C by pulsed laser deposition (PLD) process using Sb₂Te₃ target. The crystal structure and crystallization behavior of Sb₂Te₃ film was determined by X-ray diffraction (XRD) and Raman spectra, respectively. The surface morphology of the film was measured by atomic force microscope (AFM). The results suggest that the crystalline of Sb₂Te₃ thin film was crystallized well when the substrate temperature (T_sub) was 180°C, which indicated that Sb₂Te₃ thin film can be fabricated by PLD at suitable temperature.

Citation Download Citation

Tantan Liu, Hongmei Deng, Pingxiong Yang, Jun Zhang, Huiyi Cao, Jun He, and Junhao Chu "Growth and characterization of Sb₂Te₃ thin film deposited by pulsed laser method", Proc. SPIE 9068, Eighth International Conference on Thin Film Physics and Applications, 90681E (16 December 2013); https://doi.org/10.1117/12.2053508

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