Digital holographic Michelson interferometer for nanometrology

Alexander A. Sevrygin; V. I. Korotkov; S. A. Pulkin; I. M. Tursunov; D. V. Venediktov; V. Yu. Venediktov; O. V. Volkov

doi:10.1117/12.2071084

11 November 2014 Digital holographic Michelson interferometer for nanometrology

Alexander A. Sevrygin, V. I. Korotkov, S. A. Pulkin, I. M. Tursunov, D. V. Venediktov, V. Yu. Venediktov, O. V. Volkov

Proceedings Volume 9271, Holography, Diffractive Optics, and Applications VI; 927118 (2014) https://doi.org/10.1117/12.2071084
Event: SPIE/COS Photonics Asia, 2014, Beijing, China

Abstract

The paper considers the dynamic holographic interferometry schemes with amplification (multiplication) of holographic fringes and with correction for distortions, imposed by the interferometer scheme elements. The use of digital microscope and of the matrix light modulator with direct addressing provides the completely digital closed-loop performance of the overall system for real-time evaluation of nano-scale objects size. Considered schemes were verified in the laboratory experiment, using the Michelson micro-interferometer, equipped by the USB-microscope and digital holography stage, equipped by the Holoeye spatial light modulator.

Citation Download Citation

Alexander A. Sevrygin, V. I. Korotkov, S. A. Pulkin, I. M. Tursunov, D. V. Venediktov, V. Yu. Venediktov, and O. V. Volkov "Digital holographic Michelson interferometer for nanometrology", Proc. SPIE 9271, Holography, Diffractive Optics, and Applications VI, 927118 (11 November 2014); https://doi.org/10.1117/12.2071084

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