A novel desktop device for lapping thin-walled micro groove

Shilei Wang; Bo Wang; Lin Che; Fei Ding; Duo Li

doi:10.1117/12.2069640

21 August 2014 A novel desktop device for lapping thin-walled micro groove

Shilei Wang, Bo Wang, Lin Che, Fei Ding, Duo Li

Proceedings Volume 9283, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; 928305 (2014) https://doi.org/10.1117/12.2069640
Event: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014), 2014, Harbin, China

Abstract

This paper presents a novel desktop device for lapping thin-walled micro groove of a specimen used in optical equipment, the device is aimed to remove metamorphic layer (about 1μm thick) formed on the groove’s upper surface as well as ensure its thickness accuracy. It adopts the way of macro/micro motion combination, the macro-motion table uses stepper motor and ball screws to realize motion in large stroke, high speed and the micron level positioning, the micro-motion table uses the electrostriction appliance to actuate the flexible four bars mechanism to realize the small stroke, low speed, and the submicron level positioning. The system uses the strategy of two ways of feedback, the macro/micro motion table uses the precise linear grating as close-loop position feedback, and the sensing holder uses the eddy current transducer as the force and deformation feedback of the elastic fixture. The most novel aspect is the first proposed idea of realizing automatic feeding by elastic recovery of the fixture, whose structure has been delicately designed. In order to ensure small lapping force and relatively high natural frequency, both static and modal analysis of the fixture has been done by ANSYS, the results was in good accordance with experiments. Lapping experiments have showed that this device can remove metamorphic layer efficiently as well as obtain good surface quality at the same time.

Citation Download Citation

Shilei Wang, Bo Wang, Lin Che, Fei Ding, and Duo Li "A novel desktop device for lapping thin-walled micro groove", Proc. SPIE 9283, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, 928305 (21 August 2014); https://doi.org/10.1117/12.2069640

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
9 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Transducers

Sensing systems

Error analysis

Manufacturing

Spindles

Surface finishing

Modal analysis

Show All Keywords

Keywords/Phrases

Search In:

Publication Years