Nano-scale finishing of off-axis aspheric mirror by ion beam figuring

Wei-Jie Deng; Li-gong Zheng

doi:10.1117/12.2071418

18 November 2014 Nano-scale finishing of off-axis aspheric mirror by ion beam figuring

Wei-Jie Deng, Li-gong Zheng

Proceedings Volume 9298, International Symposium on Optoelectronic Technology and Application 2014: Imaging Spectroscopy; and Telescopes and Large Optics; 92981C (2014) https://doi.org/10.1117/12.2071418
Event: International Symposium on Optoelectronic Technology and Application 2014, 2014, Beijing, China

Abstract

The high precision off-axis asphere mirrors are quite usefull in the modern sapce optical system.in this paper, the ion beam figuring is researched to accomplish the final surface accuracy. Firstly, The IBF machine we used is introduced simplely. The correction method for the distortion in off-axis mirror interference measurement is studied. Beacasue of the curve shape of the off-axis mirror, the changing of the removal function was analyzed simply. In order to testify the reaserch, a 1100mm×800mm off-axis aspheric mirror is finished by ion beam figuring. After 2 times polishing, the surface error was corrected to RMS 9nm in full aperture and achieved 6.3nm in sub- aperture.

Citation Download Citation

Wei-Jie Deng and Li-gong Zheng "Nano-scale finishing of off-axis aspheric mirror by ion beam figuring", Proc. SPIE 9298, International Symposium on Optoelectronic Technology and Application 2014: Imaging Spectroscopy; and Telescopes and Large Optics, 92981C (18 November 2014); https://doi.org/10.1117/12.2071418

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