Optical unwrapping by triple illumination interferometer

Behnam Tayebi; Mohammad Reza Jafarfard; Farnaz Sharif; Young Sik Song; Dug Young Kim

doi:10.1117/12.2079536

13 March 2015 Optical unwrapping by triple illumination interferometer

Behnam Tayebi, Mohammad Reza Jafarfard, Farnaz Sharif, Young Sik Song, Dug Young Kim

Proceedings Volume 9369, Photonic Instrumentation Engineering II; 93690W (2015) https://doi.org/10.1117/12.2079536
Event: SPIE OPTO, 2015, San Francisco, California, United States

Abstract

Here, we present a triple illumination phase interferometer to have a more flexible unwrapping measurement range for single shot optical unwrapping. Three beams of this interferometer illuminate a sample at different incident angles, three phases of the different incident angles are simultaneously recorded using three spatial frequencies. The different direction phases can be used for dual illumination optical unwrapping; as a result, the phase can be unwrapped by more than one measurement range. The feasibility of this technique is demonstrated by measuring a stepped object with heights of 150 and 660 μm. The smaller stepped phase is unwrapped by two measurement range; however, the phase of larger step is wrapped for only one of the measurement range.

Citation Download Citation

Behnam Tayebi, Mohammad Reza Jafarfard, Farnaz Sharif, Young Sik Song, and Dug Young Kim "Optical unwrapping by triple illumination interferometer", Proc. SPIE 9369, Photonic Instrumentation Engineering II, 93690W (13 March 2015); https://doi.org/10.1117/12.2079536

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