Characterization of nanoscale multilayer structures upon thermal annealing

I. A. Makhotkin; A. Zameshin; R. W. E. van de Kruijs; A. Yakshin; F. Bijkerk

doi:10.1117/12.2182256

12 May 2015 Characterization of nanoscale multilayer structures upon thermal annealing

I. A. Makhotkin, A. Zameshin, R. W. E. van de Kruijs, A. Yakshin, F. Bijkerk

Proceedings Volume 9510, EUV and X-ray Optics: Synergy between Laboratory and Space IV; 95100V (2015) https://doi.org/10.1117/12.2182256
Event: SPIE Optics + Optoelectronics, 2015, Prague, Czech Republic

Abstract

Obtaining a high quality physical description of the layered structure of multilayer based optical coatings is an essential part of the optimization of their optical performance. Grazing incidence X-ray reflectivity (GIXR) is one of the most informative and easy-to-use non-destructive tools for the analysis of multilayer structures. The typical challenge of GIXR structural characterization is the reconstruction of the layered structure from fitting simulated data to experimental data. Here we present an example of the application of a newly developed, free-form, GIXR analysis to the characterization of heat induced structural changes in periodic La/B multilayers. This example shows that the developed algorithm is capable of reconstructing electron density profiles in cases where a classical non free-form approach generally fails.

Citation Download Citation

I. A. Makhotkin, A. Zameshin, R. W. E. van de Kruijs, A. Yakshin, and F. Bijkerk "Characterization of nanoscale multilayer structures upon thermal annealing", Proc. SPIE 9510, EUV and X-ray Optics: Synergy between Laboratory and Space IV, 95100V (12 May 2015); https://doi.org/10.1117/12.2182256

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available