Fatigue analysis of chevron structures with Z shape arms

Margarita Tecpoyotl Torres; Ramón Cabello Ruiz; J. Gerardo Vera Dimas; J. Alfredo Rodriguez Ramirez; J. Jesus Escobedo Alatorre; Alejandra Ocampo Diaz

doi:10.1117/12.2187152

26 August 2015 Fatigue analysis of chevron structures with Z shape arms

Margarita Tecpoyotl Torres, Ramón Cabello Ruiz, J. Gerardo Vera Dimas, J. Alfredo Rodriguez Ramirez, J. Jesus Escobedo Alatorre, Alejandra Ocampo Diaz

Author Affiliations +

Proceedings Volume 9553, Low-Dimensional Materials and Devices; 955318 (2015) https://doi.org/10.1117/12.2187152
Event: SPIE Nanoscience + Engineering, 2015, San Diego, California, United States

Abstract

Due to the diversity and multiple energy domains involved, Micro-Electromechanical Systems MEMS devices are vulnerable to several mechanical failures such as fatigue. They been widely used in military applications, radio frequency systems, pressure sensors, automotive industry, among several others. Most MEMS devices contain moving parts that are subjected to cyclic loading, which degrade the device´s efficiency. Due to the high importance of MEMS in various applications, it is necessary to know their lifetime to prevent any damage or process discontinuity to which the system is subject. There have been several investigations in particular on the fatigue analysis in presence of cracks, however in terms of lifetime under cycling load, information is not abundant. The fatigue analysis can be performed for characterizing the ability of materials to support many cycles. Some parts of systems are exposed to strong stress level experiences during its usable lifetime, so the analysis must be focused on them. In this paper, a simulated fatigue analysis of classic, Z-shape and optimized chevron with Z shape arms is shown. Simulations are made using Ansys 15.0, to obtain the arms lifetime of the system because they are subjected to greater stresses in the presence of cyclic loading.

Citation Download Citation

Margarita Tecpoyotl Torres, Ramón Cabello Ruiz, J. Gerardo Vera Dimas, J. Alfredo Rodriguez Ramirez, J. Jesus Escobedo Alatorre, and Alejandra Ocampo Diaz "Fatigue analysis of chevron structures with Z shape arms", Proc. SPIE 9553, Low-Dimensional Materials and Devices, 955318 (26 August 2015); https://doi.org/10.1117/12.2187152

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available