Optical frequency comb profilometry for large volume metrology

Yoshio Hayasaki; Quang Duc Pham

doi:10.1117/12.2187287

29 July 2015 Optical frequency comb profilometry for large volume metrology

Yoshio Hayasaki, Quang Duc Pham

Proceedings Volume 9659, International Conference on Photonics Solutions 2015; 965904 (2015) https://doi.org/10.1117/12.2187287
Event: International Conference on Photonics Solutions 2015, 2015, Hua Hin, Thailand

Abstract

An optical profilometer composed of an optical frequency comb source, a single pixel camera, and an optoelectronic interferometer in radio frequecny range have been developed toward large volume metrology. The optical profilometer allows us to measure an object with a large depth much more than a light wavelength without any 2π phase ambiguity. The wide dynamic range is achieved with high stability of the optical frequency comb and the simultaneous multi-singlefrequency operation. The single pixel camera is used for two-dimensional imaging without a mechanical scanning and the compressive sensing technique reduces the number of measurements. A surface profilometry for an object with a depth of several centimeters to a meter is demonstrated.

Citation Download Citation

Yoshio Hayasaki and Quang Duc Pham "Optical frequency comb profilometry for large volume metrology", Proc. SPIE 9659, International Conference on Photonics Solutions 2015, 965904 (29 July 2015); https://doi.org/10.1117/12.2187287

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