Iterative algorithm for reconstructing rotationally asymmetric surface deviation with pixel-level spatial resolution

Haiyang Quan; Fan Wu; Xi Hou

doi:10.1117/12.2199700

8 October 2015 Iterative algorithm for reconstructing rotationally asymmetric surface deviation with pixel-level spatial resolution

Haiyang Quan, Fan Wu, Xi Hou

Author Affiliations +

Proceedings Volume 9677, AOPC 2015: Optical Test, Measurement, and Equipment; 96771M (2015) https://doi.org/10.1117/12.2199700
Event: Applied Optics and Photonics China (AOPC2015), 2015, Beijing, China

Abstract

New method for reconstructing rotationally asymmetric surface deviation with pixel-level spatial resolution is proposed. It is based on basic iterative scheme and accelerates the Gauss-Seidel method by introducing an acceleration parameter. This modified Successive Over-relaxation (SOR) is effective for solving the rotationally asymmetric components with pixel-level spatial resolution, without the usage of a fitting procedure. Compared to the Jacobi and Gauss-Seidel method, the modified SOR method with an optimal relaxation factor converges much faster and saves more computational costs and memory space without reducing accuracy. It has been proved by real experimental results.

Citation Download Citation

Haiyang Quan, Fan Wu, and Xi Hou "Iterative algorithm for reconstructing rotationally asymmetric surface deviation with pixel-level spatial resolution", Proc. SPIE 9677, AOPC 2015: Optical Test, Measurement, and Equipment, 96771M (8 October 2015); https://doi.org/10.1117/12.2199700

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