Optical properties of thermally evaporated ultra-thin Al, Ag and Cu films

Ming Zhou; Yaopeng Li; Sheng Zhou; Li Zhang; Yuan Cai; Dingquan Liu

doi:10.1117/12.2242251

25 October 2016 Optical properties of thermally evaporated ultra-thin Al, Ag and Cu films

Ming Zhou, Yaopeng Li, Sheng Zhou, Li Zhang, Yuan Cai, Dingquan Liu

Proceedings Volume 9686, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices; 96860M (2016) https://doi.org/10.1117/12.2242251
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

In this article, ultra-thin Al, Ag, Cu thin films with thickness d ~10nm are prepared by thermal evaporation, Ellipsometer and Spectrophotometer are used to measure Ψ, ∆, R and T of samples. Based on the characteristics of different metal materials, we choose proper physical model to analysis the dielectric function. Experimental results show that the method of Ellipsometer with transmittance data fitting can describe optical constants of ultra-thin metal films, and all the parameters of Ψ, ∆ and T show a good fitting result. Moreover, the reflection of samples simulated by MathCAD software using Fresnel coefficient equations also follows the measured reflectance data.

Citation Download Citation

Ming Zhou, Yaopeng Li, Sheng Zhou, Li Zhang, Yuan Cai, and Dingquan Liu "Optical properties of thermally evaporated ultra-thin Al, Ag and Cu films", Proc. SPIE 9686, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices, 96860M (25 October 2016); https://doi.org/10.1117/12.2242251

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