Paper
26 May 2016 Broadband antireflection with curved surface nano-pyramids for image sensing devices
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Abstract
The reflection loss in imaging devices is one of the major drawbacks, which degrades efficiency resulting in lower responsivity. Since the reflected light is no longer available for conversion into electrons, it is very important to reduce the reflection from the top surface of the device as much as possible. Quarter wavelength and two index antireflection (AR) coatings have been developed to reduce reflection; however, these AR coatings are wavelength dependent and have not performed effectively in a broadband range. Attempts to make AR coating for broadband wavelengths by stacking multiple index AR layers result in thicker and expensive solutions, which still do not provide proper antireflection at all desired wavelengths. Moreover, the usage of AR coatings escalates material and fabrication costs of the device. We propose a novel nanostructure, which matches the refractive index of the device to that of free space to reduce reflection from the top surface, eliminating the use of AR coatings and hence reducing the device cost. It is shown via simulation that the proposed nanostructure effectively eliminates the reflection loss over the broadband spectrum of desired wavelengths e.g. Visible, Mid-wave IR (MWIR), Short-wave IR (SWIR) spectrums, opening various application opportunities.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Anil Shrestha, Genki Mizuno, Patrick Oduor, Achyut K. Dutta, and Nibir K. Dhar "Broadband antireflection with curved surface nano-pyramids for image sensing devices", Proc. SPIE 9854, Image Sensing Technologies: Materials, Devices, Systems, and Applications III, 985406 (26 May 2016); https://doi.org/10.1117/12.2230287
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Cited by 1 scholarly publication.
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KEYWORDS
Silicon

Antireflective coatings

Reflection

Nanostructures

Refractive index

Image sensors

Mid-IR

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