Development and investigation of MOEMS type displacement-pressure sensor for biological information monitoring

Vytautas Ostasevicius; Karolis Malinauskas; Giedrius Janusas; Arvydas Palevicius; Elingas Cekas

doi:10.1117/12.2228792

29 April 2016 Development and investigation of MOEMS type displacement-pressure sensor for biological information monitoring

Vytautas Ostasevicius, Karolis Malinauskas, Giedrius Janusas, Arvydas Palevicius, Elingas Cekas

Author Affiliations +

Proceedings Volume 9899, Optical Sensing and Detection IV; 98992Q (2016) https://doi.org/10.1117/12.2228792
Event: SPIE Photonics Europe, 2016, Brussels, Belgium

Abstract

The aim of this paper is to develop and investigate MOEMS displacement-pressure sensor for biological information monitoring. Developing computational periodical microstructure models using COMSOL Multiphysics modeling software for modal and shape analysis and implementation of these results for design MOEMS displacement-pressure sensor for biological information monitoring was performed. The micro manufacturing technology of periodical microstructure having good diffraction efficiency was proposed. Experimental setup for characterisation of optical properties of periodical microstructure used for design of displacement-pressure sensor was created. Pulsating human artery dynamic characteristics in this paper were analysed.

Citation Download Citation

Vytautas Ostasevicius, Karolis Malinauskas, Giedrius Janusas, Arvydas Palevicius, and Elingas Cekas "Development and investigation of MOEMS type displacement-pressure sensor for biological information monitoring", Proc. SPIE 9899, Optical Sensing and Detection IV, 98992Q (29 April 2016); https://doi.org/10.1117/12.2228792

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