Paper
22 July 2016 New grating concepts in the NIR and SWIR spectral band for high resolution earth-observation spectrometers
T. Flügel-Paul, G. Kalkowski, T. Benkenstein, T. Harzendorf, A. Matthes, U. D. Zeitner
Author Affiliations +
Abstract
We report about our latest achievements to realize the diffraction gratings during the development activities for a future Earth observation high resolution spectrometer studied by ESA. The gratings are manufactured by electron beam lithography on fused silica substrates. The optical performance is considerably increased by applying a dedicated high refractive index coating to the grating structure using atomic layer deposition (ALD). Thus, we were able to achieve diffraction efficiencies larger than 75% averaged over both linear polarizations states, i.e. TE and TM. At the same time, the polarization sensitivity is well below 10% in both cases. Finally, the diffraction gratings for the SWIR-1 spectral channel were bonded on a massive prism substrate in order to realize a GRISM element. This process was achieved by direct fused silica bonding performed under atmospheric pressure within special mechanical equipment designed and constructed particularly for this purpose.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
T. Flügel-Paul, G. Kalkowski, T. Benkenstein, T. Harzendorf, A. Matthes, and U. D. Zeitner "New grating concepts in the NIR and SWIR spectral band for high resolution earth-observation spectrometers", Proc. SPIE 9912, Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation II, 99122A (22 July 2016); https://doi.org/10.1117/12.2232538
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Diffraction gratings

Silica

Diffraction

Near infrared

Coating

Manufacturing

Polarization

Back to Top