Author Affiliations +
Andreia Santos,1 Yuji Tanaka,2 Masaya Asai,2 Masahiko Harumoto,2 Wesley Zanders,1 Jelle Vandereyken,3 Lander Verstraete,3 Ashish Rathore,3 Hyo Seon Suh3
1SCREEN SPE Germany GmbH (Belgium)
2SCREEN Semiconductor Solutions Co., Ltd. (Japan)
3IMEC (Belgium)