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17 March 2023 Single-mode integrated out-of-plane meta beam shaper
Hrishikesh Iyer, Yurii Vlasov
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Proceedings Volume PC12432, High Contrast Metastructures XII; PC124320O (2023) https://doi.org/10.1117/12.2650267
Event: SPIE OPTO, 2023, San Francisco, California, United States
Abstract
Integration of metasurfaces with planar waveguide integrated circuits can provide unique functionalities for beam shaping. Recent works show vertical integration of independently designed planar sources and metalenses, however this is not trivial or scalable. Here, we demonstrate an inverse design approach to co-optimize and merge grating and metalens functions into an out-of-plane beam shaper within a single 240nm silicon nitride layer. To exemplify, we demonstrate a 240nm thick meta-beam shaper that focuses 473nm light into a diffraction-limited spot with sidelobe suppression over 10dB. This approach for inverse design is generalizable to arbitrary beam shapes, unlocking a wide variety of applications.
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Hrishikesh Iyer and Yurii Vlasov "Single-mode integrated out-of-plane meta beam shaper", Proc. SPIE PC12432, High Contrast Metastructures XII, PC124320O (17 March 2023); https://doi.org/10.1117/12.2650267
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KEYWORDS
Beam shaping
Dielectrics
Waveguides
Integrated circuits
Optical design
Planar waveguides
Silicon
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