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5 October 2023 Tuning the optical properties of phase change material through glancing angle deposition techniques
Viraj Vishnu Bhingardive, Avik Mandal, Abbas Sheikh Ansari, Behrad Gholipour, Joshua Perkins
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Proceedings Volume PC12653, Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XX; PC1265304 (2023) https://doi.org/10.1117/12.2677082
Event: SPIE Nanoscience + Engineering, 2023, San Diego, California, United States
Abstract
We show a new approach for achieving precise control over the internal structure of phase-change materials (PCMs) using the glancing angle deposition (GLAD) technique, which offers a foundry-friendly bottom-up growth alternative to commonly used lithography or chemical modification methods that introduce unwanted defects and impurities. We show that by adjusting deposition angle and rotation speed during growth, GLAD can enable a precise and unprecedented engineering of refractive index and extinction coefficient, in both amorphous and crystalline phases of commonly used GeTe and GST PCM films, without the need to alter their chemical composition.
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Viraj Vishnu Bhingardive, Avik Mandal, Abbas Sheikh Ansari, Behrad Gholipour, and Joshua Perkins "Tuning the optical properties of phase change material through glancing angle deposition techniques", Proc. SPIE PC12653, Nanoengineering: Fabrication, Properties, Optics, Thin Films, and Devices XX, PC1265304 (5 October 2023); https://doi.org/10.1117/12.2677082
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KEYWORDS
Optical properties
Refractive index
Antimony
Chemical composition
Ferroelectric materials
Mineralogy
Optical testing
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