Presentation
1 October 2024 Study on the new characteristics of optical system surface finishing using gas cluster ion beam
Myoung Choul Choi, Aram Hong, Sangwon Hyun, Mourad Idir, Tianyi Wang, Dae Wook Kim
Author Affiliations +
Abstract
This study explores a novel approach for optical system surface finish using Gas Cluster Ion Beam (GCIB).
Conference Presentation
© (2024) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Myoung Choul Choi, Aram Hong, Sangwon Hyun, Mourad Idir, Tianyi Wang, and Dae Wook Kim "Study on the new characteristics of optical system surface finishing using gas cluster ion beam", Proc. SPIE PC13134, Optical Manufacturing and Testing 2024, PC1313406 (1 October 2024); https://doi.org/10.1117/12.3027095
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KEYWORDS
Ion beams

Surface finishing

Beam diameter

Etching

Ion beam finishing

Statistical analysis

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