Fully model-based methodology for simultaneous correction of extreme ultraviolet mask shadowing and proximity effects

Philip C. W. Ng; Kuen-Yu Tsai; Yen-Min Lee; Fu-Min Wang; Jia-Han Li; Alek C. Chen

doi:10.1117/1.3533222

1 January 2011 Fully model-based methodology for simultaneous correction of extreme ultraviolet mask shadowing and proximity effects

Philip C. W. Ng, Kuen-Yu Tsai, Yen-Min Lee, Fu-Min Wang, Jia-Han Li, Alek C. Chen

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 10, Issue 1, 013004 (January 2011). https://doi.org/10.1117/1.3533222

Abstract

Extreme ultraviolet (EUV) lithography is a promising candidate for high-volume manufacturing at the 22-nm half-pitch node and beyond. EUV projection lithography systems need to rely on reflective optical elements and masks with oblique illumination for image formation. It leads to undesired effects such as pattern shift and horizontal-to-vertical critical dimension bias, which are generally reported as shadowing. Rule-based approaches proposed to compensate for shadowing include changing mask topography, introducing mask defocus, and biasing patterns differently at different slit positions. However, the electromagnetic interaction between the incident light and the mask topography with complicated geometric patterns, such as optical diffraction, not only causes shadowing but also induces proximity effects. This phenomenon cannot be easily taken into account by rule-based corrections and thus imposes a challenge on a partially model-based correction flow, the so-called combination of rule- and model-based corrections. A fully model-based correction flow, which integrates an in-house optical proximity correction algorithm with rigorous three-dimensional mask simulation, is proposed to simultaneously compensate for shadowing and proximity effects. Simulation results for practical circuit layouts indicate that the fully model-based correction flow significantly outperforms the partially model-based one in terms of correction accuracy, while the total run time is slightly increased.

©(2011) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Philip C. W. Ng, Kuen-Yu Tsai, Yen-Min Lee, Fu-Min Wang, Jia-Han Li, and Alek C. Chen "Fully model-based methodology for simultaneous correction of extreme ultraviolet mask shadowing and proximity effects," Journal of Micro/Nanolithography, MEMS, and MOEMS 10(1), 013004 (1 January 2011). https://doi.org/10.1117/1.3533222

Published: 1 January 2011

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