Fabrication of three-dimensional and submicrometer-scaled microstructures based on metal contact printing and silicon bulk machining

Kuo-Lun Kao; Cho-Wei Chang; Yung-Chun Lee

doi:10.1117/1.JMM.13.2.023008

21 May 2014 Fabrication of three-dimensional and submicrometer-scaled microstructures based on metal contact printing and silicon bulk machining

Kuo-Lun Kao, Cho-Wei Chang, Yung-Chun Lee

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 13, Issue 2, 023008 (May 2014). https://doi.org/10.1117/1.JMM.13.2.023008

Abstract

This paper describes a method that contains a series of processes for producing three-dimensional (3-D) microstructures with a feature size in the submicrometer scale. It starts from using a metal contact printing lithography to pattern a thin metal film on the surface of a (100) silicon substrate. The metal film has a hole-array pattern with a hole diameter ranging from 300 nm to 800 nm and is used as an etching mask for silicon bulk machining to create concave pyramid-shaped surface microstructures. Using this bulk-machined silicon substrate as a template, polymer 3-D microstructures are replicated on top of a silicon dioxide (SiO₂ ) layer. Finally, through a dry etching process, 3-D microstructures with a profile similar to the replicated polymer microstructures are formed on the SiO ₂ layer. Potential applications of these fabricated SiO ₂ microstructures in the light-emitting diode industry will be addressed.

Citation Download Citation

Kuo-Lun Kao, Cho-Wei Chang, and Yung-Chun Lee "Fabrication of three-dimensional and submicrometer-scaled microstructures based on metal contact printing and silicon bulk machining," Journal of Micro/Nanolithography, MEMS, and MOEMS 13(2), 023008 (21 May 2014). https://doi.org/10.1117/1.JMM.13.2.023008

Published: 21 May 2014

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available