New method of optimizing writing parameters in electron beam lithography systems for throughput improvement considering patterning fidelity constraints

Hoi-Tou Ng; Yu-Tian Shen; Sheng-Yung Chen; Chun-Hung Liu; Philip C. W. Ng; Kuen-Yu Tsai

doi:10.1117/1.JMM.11.3.033007

22 August 2012 New method of optimizing writing parameters in electron beam lithography systems for throughput improvement considering patterning fidelity constraints

Hoi-Tou Ng, Yu-Tian Shen, Sheng-Yung Chen, Chun-Hung Liu, Philip C. W. Ng, Kuen-Yu Tsai

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 11, Issue 3, 033007 (August 2012). https://doi.org/10.1117/1.JMM.11.3.033007

Abstract

Low-energy electron beam lithography is one of the promising next-generation lithography technology solutions for the 21-nm half-pitch node and beyond because of fewer proximity effects, higher resist sensitivity, and less substrate damage compared with high-energy electron beam lithography. To achieve high-throughput manufacturing, low-energy electron beam lithography systems with writing parameters of larger beam size, larger grid size, and lower dosage are preferred. However, electron shot noise can significantly increase critical dimension deviation and line edge roughness. Its influence on patterning prediction accuracy becomes nonnegligible. To effectively maximize throughput while meeting patterning fidelity requirements according to the International Technology Roadmap for Semiconductors, a new method is proposed in this work that utilizes a new patterning prediction algorithm to rigorously characterize the patterning variability caused by the shot noise and a mathematical optimization algorithm to determine optimal writing parameters. The new patterning prediction algorithm can achieve a proper trade-off between computational effort and patterning prediction accuracy. Effectiveness of the new method is demonstrated on a static random-access memory circuit. The corresponding electrical performance is analyzed by using a gate-slicing technique and publicly available transistor models. Numerical results show that a significant improvement in the static noise margin can be achieved.

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Hoi-Tou Ng, Yu-Tian Shen, Sheng-Yung Chen, Chun-Hung Liu, Philip C. W. Ng, and Kuen-Yu Tsai "New method of optimizing writing parameters in electron beam lithography systems for throughput improvement considering patterning fidelity constraints," Journal of Micro/Nanolithography, MEMS, and MOEMS 11(3), 033007 (22 August 2012). https://doi.org/10.1117/1.JMM.11.3.033007

Published: 22 August 2012

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