Ultraviolet And Extreme Ultraviolet Response Of Charge-Coupled-Device Detectors

R. A. Stern; R. C. Catura; R. Kimble; A. F. Davidsen; M. Winzenread; M. M. Blouke; R. Hayes; D. M. Walton; J. L. Culhane

doi:10.1117/12.7974165

1 September 1987 Ultraviolet And Extreme Ultraviolet Response Of Charge-Coupled-Device Detectors

R. A. Stern, R. C. Catura, R. Kimble, A. F. Davidsen, M. Winzenread, M. M. Blouke, R. Hayes, D. M. Walton, J. L. Culhane

Author Affiliations +

Optical Engineering, Vol. 26, Issue 9, 269875 (September 1987). https://doi.org/10.1117/12.7974165

Abstract

We present results of a program to enhance the ultraviolet and extreme ultraviolet response of charge-coupled devices. The ultimate goal of our program is to develop a large format device with both high and stable quantum efficiency from 100 to 3000 A that can be used as a windowless imaging detector in a space environment. Ultraviolet quantum efficiency measurements have been made for several ion-implanted and laser-annealed test CCDs specially fabricated by Tektronix for this program. Quantum efficiencies as high as 22% at 2500 A , where the absorption depth in silicon is -55 A, have been observed in one such test CCD. Quantum efficiency measurements of standard back-illuminated RCA and Tektronix CCDs are also presented.

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R. A. Stern, R. C. Catura, R. Kimble, A. F. Davidsen, M. Winzenread, M. M. Blouke, R. Hayes, D. M. Walton, and J. L. Culhane "Ultraviolet And Extreme Ultraviolet Response Of Charge-Coupled-Device Detectors," Optical Engineering 26(9), 269875 (1 September 1987). https://doi.org/10.1117/12.7974165

Published: 1 September 1987

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