Multifunctional holographic elements for surface measurements

Erez Hasman; Nir Davidson; Asher A. Friesem

doi:10.1117/12.56078

1 February 1992 Multifunctional holographic elements for surface measurements

Erez Hasman, Nir Davidson, Asher A. Friesem

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Optical Engineering, Vol. 31, Issue 2, (February 1992). https://doi.org/10.1117/12.56078

Abstract

A novel single multifunctional holographic optical element is incorporated into a surface measurement system. As a result the system is lightweight, compact, and simpler than conventional ones. Numerical calculation reveals that submicron resolutions are possible both in the horizontal and vertical directions. Finally, experimental results demonstrate the feasibility of the approach.

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Erez Hasman, Nir Davidson, and Asher A. Friesem "Multifunctional holographic elements for surface measurements," Optical Engineering 31(2), (1 February 1992). https://doi.org/10.1117/12.56078

Published: 1 February 1992

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