New compensating four-phase algorithm for phase-shift interferometry

Johannes Schwider; Oliver R. Falkenstoerfer; Horst Schreiber; Andreas Zoeller; Norbert Streibl

doi:10.1117/12.143340

1 August 1993 New compensating four-phase algorithm for phase-shift interferometry

Johannes Schwider, Oliver R. Falkenstoerfer, Horst Schreiber, Andreas Zoeller, Norbert Streibl

Author Affiliations +

Optical Engineering, Vol. 32, Issue 8, (August 1993). https://doi.org/10.1117/12.143340

Abstract

Phase-shift interferometry suffers from periodic systematic errors caused by erroneous reference phase adjustments and instabilities of the interferometer. A new method is described that uses only four interferograms and eliminates the errors caused by linear adjustment deviations of the reference phase or the mean phase in the interferometer. Test results confirm the theoretical predictions.

Citation Download Citation

Johannes Schwider, Oliver R. Falkenstoerfer, Horst Schreiber, Andreas Zoeller, and Norbert Streibl "New compensating four-phase algorithm for phase-shift interferometry," Optical Engineering 32(8), (1 August 1993). https://doi.org/10.1117/12.143340

Published: 1 August 1993

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