Low-pressure 50-mJ KrF laser

Promod K. Bhatnagar; Bijendra Singh; Utpal Nundy

doi:10.1117/12.168248

1 June 1994 Low-pressure 50-mJ KrF laser

Promod K. Bhatnagar, Bijendra Singh, Utpal Nundy

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Optical Engineering, Vol. 33, Issue 6, (June 1994). https://doi.org/10.1117/12.168248

Abstract

Operation of a discharge-pumped KrF laser consisting of an all stainless steel chamber and using pure argon as the buffer gas at subatmospheric pressure is reported. The optimized pulse energy of ~50 mJ was achieved from about 60 cm³ active volume and at ~36 kV charging voltage. The optimized pressure of the gas mixture was about800 mbar.

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Promod K. Bhatnagar, Bijendra Singh, and Utpal Nundy "Low-pressure 50-mJ KrF laser," Optical Engineering 33(6), (1 June 1994). https://doi.org/10.1117/12.168248

Published: 1 June 1994

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